SHANGHAI, March 13, 2018 /PRNewswire/ -- This week at SEMICON China, Advanced Micro-Fabrication Equipment Inc. (AMEC) formally unveiled the Primo nanova® system (nanova) - the company's first ...
In dry etching, the trajectory of accelerated ions is non-uniform and non-vertical, due to collisions with gas molecules and other random thermal effects (figure 1). This has an impact on etch results ...
Achieves Damage-Free Atomic-Level Etching with a Wide Range of Optional Functions TOKYO--(BUSINESS WIRE)--Hitachi High-Technologies Corporation (TSE: 8036) (Hitachi High-Tech) announced the ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results